JPH0460548U - - Google Patents
Info
- Publication number
- JPH0460548U JPH0460548U JP10110890U JP10110890U JPH0460548U JP H0460548 U JPH0460548 U JP H0460548U JP 10110890 U JP10110890 U JP 10110890U JP 10110890 U JP10110890 U JP 10110890U JP H0460548 U JPH0460548 U JP H0460548U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- heating device
- cooling
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110890U JPH0460548U (en]) | 1990-09-26 | 1990-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110890U JPH0460548U (en]) | 1990-09-26 | 1990-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460548U true JPH0460548U (en]) | 1992-05-25 |
Family
ID=31844282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10110890U Pending JPH0460548U (en]) | 1990-09-26 | 1990-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460548U (en]) |
-
1990
- 1990-09-26 JP JP10110890U patent/JPH0460548U/ja active Pending